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Self-Heating and Polarization Effects in AlGaN/AlN/GaN/AlGaN Based Devices

机译:基于AlGaN / AlN / GaN / AlGaN的器件中的自加热和极化效应

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摘要

The interplay of self-heating and polarization affecting the current is studied in Al0.32Ga0.68N/AlN/GaN/Al0.1Ga0.9N Transmission Line Model (TLM) heterostructures with a scaled source-drain distance. The study is based on meticulously calibrated TCAD simulations against I-V experimental characteristics using an electro-thermal model. The electro-thermal simulations show hot-spots at the edge of the drain contact due to a large electric field affecting the device reliability. Due to the applied electrical stress, the total polarization, relative to the 18 μm heterostructure, decreases by 7 %, 10 % and 17% during a reduction of the source-to-drain distance to the 12 μm, 8 μm, and 4 μm, respectively, as a result of the additional strain induced by electrical stress. This additional stress on source/drain contacts reduces the polarization at the surface leading to the inverse piezoelectric effect.
机译:在具有缩放的源极-漏极距离的Al0.32Ga0.68N / AlN / GaN / Al0.1Ga0.9N传输线模型(TLM)异质结构中,研究了自发热和极化影响电流的相互作用。这项研究基于使用电热模型针对I-V实验特性进行了精心校准的TCAD仿真。电热模拟显示,由于大电场影响器件的可靠性,因此在漏极接触的边缘出现了热点。由于施加的电应力,相对于18μm的异质结构,总极化在源到漏距离减小到12μm,8μm和4μm的过程中分别降低了7%,10%和17%。分别是由于电应力引起的附加应变的结果。源极/漏极触点上的这种额外应力会降低表面上的极化,从而导致压电反作用。

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